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Photovoltaic equipment

Tubular PECVD automatic loading and unloading

This equipment automation is mainly used in battery factories, butt-connected PECVD graphite boat coating automatic production line, including automatic guiding function between flower basket and graphite boat, and docking signal processing

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Equipment function
Device parameters
Series products

Equipment function

Device parameters

Project	Parameters	Remarks
Wafer specifications	210*210mm	Compatible with 180180mm-220230mm
Wafer thickness	150-220um
Capacity	≥4000P/H (online)
Precision	≥2mm	Use full step mode transmission
Loading and unloading methods	100 slot flower basket
Picking method		Six-axis robot and high-performance suction cup set (ceramic)
Channel Flower Basket	5+2 per cache	Dual-channel loading and unloading, reserved front inspection + back inspection + PL inspection station, equipped with gripper
Fragmentation rate	≤0.03%	(1% of downtime includes equipment maintenance and abnormal downtime); calculated based on 1 month of continuous work
Boot rate	≥99%
Other	Lay the chip drop detection system under the insertion position

At the docking point of the graphite boat import and export, an automatic boat shooting system is installed, and the position is set reasonably.
1. The loading is completed, and the boat needs to be shot before manual inspection;
2. After the host machine unloads and shoots the boat, check it manually.

National Service Phone:0512-66380672 Tel：0512-66380672 Add：3939 Puzhuang Avenue, Wuzhong District, Suzhou City

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